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Process of forming an electrically erasable programmable...

Etching a substrate: processes – Gas phase etching of substrate
Reexamination Certificate

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Process of making monolithic cavity microchips

Etching a substrate: processes – Forming or treating optical article
Patent

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Process of manufacturing a detecting unit for an electrolytic ce

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
Patent

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Process of manufacturing a glass substrate for a magnetic disk

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Resist material applied in particulate form or spray
Patent

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Process of producing diffraction grating

Etching a substrate: processes – Forming or treating optical article
Patent

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Process optimization in gas phase dry etching

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
Patent

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Process to avoid dielectric damage at the flat edge of the water

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
Patent

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Process to form fine features using photolithography and...

Etching a substrate: processes – Forming or treating an article whose final configuration has...
Reexamination Certificate

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Process to manufacture bushings for micromechanical elements

Etching a substrate: processes – Etching of semiconductor material to produce an article...
Patent

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Process to preserve silver metal while forming integrated circui

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
Patent

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Process to reduce surface roughness of low K damascene

Etching a substrate: processes – Planarizing a nonplanar surface
Reexamination Certificate

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Process to tune the slider trailing edge profile

Etching a substrate: processes – Forming or treating article containing magnetically...
Reexamination Certificate

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Process used in an RF coupled plasma reactor

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
Patent

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Process vessel

Etching a substrate: processes – Nongaseous phase etching of substrate
Reexamination Certificate

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Processes and apparatuses for producing porous materials

Etching a substrate: processes – Etching to produce porous or perforated article
Reexamination Certificate

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Processes and materials for step and flash imprint lithography

Etching a substrate: processes – Pattern or design applied by transfer
Reexamination Certificate

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Processes and materials for step and flash imprint lithography

Etching a substrate: processes – Pattern or design applied by transfer
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Processes for fabricating device layers with ultrafine features

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Mask is exposed to nonimaging radiation
Patent

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Processing apparatus

Etching a substrate: processes – Nongaseous phase etching of substrate – Substrate is multilayered
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Processing apparatus and method

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Mechanically forming pattern into a resist
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