Process of making monolithic cavity microchips

Details Process of making monolithic cavity microchips Process of making monolithic cavity microchips

1997-12-31

2000-12-05

Gulakowski, Randy

Etching a substrate: processes

Forming or treating optical article

216 88, 216 26, 372 92, B29D 1100, H01S 308

Patent

active

06156219&

ABSTRACT:
Fabrication techniques to from a multi-structured monolithic cavity that generates a single axial mode of laser operation are described. These simple techniques improve laser performance and reliability while minimizing the number of process steps. Mass production of high performance lasers will become possible by using these techniques.

REFERENCES:
patent: 5177764 (1993-01-01), Nilsson
patent: 5375138 (1994-12-01), Kozlovsky et al.
patent: 5574740 (1996-11-01), Hargis et al.
patent: 5651023 (1997-07-01), MacKinnon
patent: 5838713 (1998-11-01), Shimoji

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