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Method for forming micro patterns of semiconductor devices

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Mask is multilayer resist
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Method for forming pattern

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
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Method for hard mask CD trim

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
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Method for hard mask CD trim

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
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Method for making a sculptured diaphragm

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
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Method for manufacturing a semiconductor device with ultra-fine

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Mask resist contains inorganic material
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Method for manufacturing porous structure and method for...

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
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Method for manufacturing printing plate

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
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Method for manufacturing semiconductor integrated circuit...

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
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Method for pattern formation

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
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Method for patterning high density field emitter tips

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Resist material applied in particulate form or spray
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Method for patterning high density field emitter tips

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Resist material applied in particulate form or spray
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Method for patterning high density field emitter tips

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Resist material applied in particulate form or spray
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Method for pitch reduction

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Masking of sidewall
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Method for preventing the etch transfer of sidelobes in...

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Mask is multilayer resist
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Method for producing a solid body including a microstructure

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
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Method for producing semiconductor optical device

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
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Method for producing tapered waveguide

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Mask is multilayer resist
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Method for reactive ion etching and apparatus therefor

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
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Method for removing color resist for exposure alignment

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
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