Microfluidic systems with embedded materials and structures...
Microlens forming method
Micromechanical mass flow sensor and method for the...
Micromirror unit and method of making the same
Microwave plasma discharge device
Microwave plasma processing method and apparatus
Miniature optically transparent window
Minimizing arcing in a plasma processing chamber
Mitigation of radiation induced surface contamination
Molecular layers covalently bonded to silicon surfaces
Monitor of plasma processes with multivariate statistical analys
Multi-electrode plasma processing apparatus
Multi-layer/multi-input/multi-output (MLMIMO) models and...
Multi-phase DC plasma processing system
Multi-step metallization etch
Multi-temperature processing
Multi-temperature processing
Multi-temperature processing
Multibeam laser servowriting of magnetic data storage media
Multibeam laser servowriting of magnetic data storage media