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Microfluidic systems with embedded materials and structures...

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Microlens forming method

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Micromechanical mass flow sensor and method for the...

Etching a substrate: processes – Gas phase etching of substrate – Etching inorganic substrate
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Micromirror unit and method of making the same

Etching a substrate: processes – Gas phase etching of substrate
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Microwave plasma discharge device

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Microwave plasma processing method and apparatus

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Miniature optically transparent window

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
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Minimizing arcing in a plasma processing chamber

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Mitigation of radiation induced surface contamination

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Molecular layers covalently bonded to silicon surfaces

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Monitor of plasma processes with multivariate statistical analys

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
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Multi-electrode plasma processing apparatus

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Multi-layer/multi-input/multi-output (MLMIMO) models and...

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
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Multi-phase DC plasma processing system

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Multi-step metallization etch

Etching a substrate: processes – Gas phase etching of substrate – Etching inorganic substrate
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Multi-temperature processing

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
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Multi-temperature processing

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Multi-temperature processing

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
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Multibeam laser servowriting of magnetic data storage media

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Multibeam laser servowriting of magnetic data storage media

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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