Microfluidic systems with embedded materials and structures...

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...

Reexamination Certificate

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C029S623400, C156S089120

Reexamination Certificate

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10853859

ABSTRACT:
Described herein is a process for fabricating microfluidic systems with embedded components in which micron-scale features are molded into the polymeric material polydimethylsiloxane (PDMS). Micromachining is used to create a mold master and the liquid precursors for PDMS are poured over the mold and allowed to cure. The PDMS is then removed form the mold and bonded to another material such as PDMS, glass, or silicon after a simple surface preparation step to form sealed microchannels.

REFERENCES:
patent: 6465119 (2002-10-01), Koripella et al.
patent: 6497975 (2002-12-01), Bostaph et al.
patent: 2003/0017305 (2003-01-01), Roitman et al.
patent: 2004/0062965 (2004-04-01), Morse et al.
patent: 2004/0072039 (2004-04-01), Jankowski et al.
patent: 2006/0000548 (2006-01-01), Morse et al.

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