LandOfFree - US Patents - Listing for Etching a substrate: processes,Gas phase etching of substrate,Irradiating, ion implanting, alloying, diffusing, or...

Etching a substrate: processes – Gas phase etching of substrate – Irradiating – ion implanting – alloying – diffusing – or...

Diffusion patterning process and screen therefor

Etching a substrate: processes – Gas phase etching of substrate – Irradiating – ion implanting – alloying – diffusing – or...

Fabrication of improved low-k dielectric structures

Etching a substrate: processes – Gas phase etching of substrate – Irradiating – ion implanting – alloying – diffusing – or...

Fabrication of long range periodic nanostructures in...

Etching a substrate: processes – Gas phase etching of substrate – Irradiating – ion implanting – alloying – diffusing – or...

Focused ion beam process for removal of copper

Etching a substrate: processes – Gas phase etching of substrate – Irradiating – ion implanting – alloying – diffusing – or...

Method and apparatus for controlling material removal from...

Etching a substrate: processes – Gas phase etching of substrate – Irradiating – ion implanting – alloying – diffusing – or...

Method for dry etching of transition metals

Etching a substrate: processes – Gas phase etching of substrate – Irradiating – ion implanting – alloying – diffusing – or...

Method for forming an interconnection in a semiconductor device

Etching a substrate: processes – Gas phase etching of substrate – Irradiating – ion implanting – alloying – diffusing – or...

Method of avoiding plasma arcing during RIE etching

Etching a substrate: processes – Gas phase etching of substrate – Irradiating – ion implanting – alloying – diffusing – or...

Method of reducing undesired etching of insulation due to...

Etching a substrate: processes – Gas phase etching of substrate – Irradiating – ion implanting – alloying – diffusing – or...

Methodologies to reduce process sensitivity to the chamber...

Etching a substrate: processes – Gas phase etching of substrate – Irradiating – ion implanting – alloying – diffusing – or...

Microchannel system for fluid delivery

Etching a substrate: processes – Gas phase etching of substrate – Irradiating – ion implanting – alloying – diffusing – or...

Procedure for etching of materials at the surface with...

Etching a substrate: processes – Gas phase etching of substrate – Irradiating – ion implanting – alloying – diffusing – or...

Procedure for etching of materials at the surface with...

Etching a substrate: processes – Gas phase etching of substrate – Irradiating – ion implanting – alloying – diffusing – or...

Processing low dielectric constant materials for high speed elec

Etching a substrate: processes – Gas phase etching of substrate – Irradiating – ion implanting – alloying – diffusing – or...

Semiconductor substrate with trenches of varying depth

Etching a substrate: processes – Gas phase etching of substrate – Irradiating – ion implanting – alloying – diffusing – or...

Stripping method for photoresist used as mask in Ch.sub.4 /H.sub

Etching a substrate: processes – Gas phase etching of substrate – Irradiating – ion implanting – alloying – diffusing – or...

System and method for controlling an etch process for a...

Etching a substrate: processes – Gas phase etching of substrate – Irradiating – ion implanting – alloying – diffusing – or...

Thin piece forming method