4. Etching a substrate: processes
  5. Gas phase etching of substrate
  6. Irradiating, ion implanting, alloying, diffusing, or...
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Semiconductor substrate with trenches of varying depth

Etching a substrate: processes – Gas phase etching of substrate – Irradiating – ion implanting – alloying – diffusing – or...
Reexamination Certificate

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Stripping method for photoresist used as mask in Ch.sub.4 /H.sub

Etching a substrate: processes – Gas phase etching of substrate – Irradiating – ion implanting – alloying – diffusing – or...
Patent

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System and method for controlling an etch process for a...

Etching a substrate: processes – Gas phase etching of substrate – Irradiating – ion implanting – alloying – diffusing – or...
Reexamination Certificate

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