4. Etching a substrate: processes
  5. Gas phase etching of substrate
  6. Irradiating, ion implanting, alloying, diffusing, or...
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Fabrication of improved low-k dielectric structures

Etching a substrate: processes – Gas phase etching of substrate – Irradiating – ion implanting – alloying – diffusing – or...
Reexamination Certificate

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Fabrication of long range periodic nanostructures in...

Etching a substrate: processes – Gas phase etching of substrate – Irradiating – ion implanting – alloying – diffusing – or...
Reexamination Certificate

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Focused ion beam process for removal of copper

Etching a substrate: processes – Gas phase etching of substrate – Irradiating – ion implanting – alloying – diffusing – or...
Reexamination Certificate

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