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Method and apparatus for plasma processing

Etching a substrate: processes – Gas phase etching of substrate – Etching inorganic substrate
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Method and apparatus for processing the peripheral and edge...

Etching a substrate: processes – Gas phase etching of substrate – Etching inorganic substrate
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Method and system for dry etching a metal nitride

Etching a substrate: processes – Gas phase etching of substrate – Etching inorganic substrate
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Method for controlled removal of material from a solid surface

Etching a substrate: processes – Gas phase etching of substrate – Etching inorganic substrate
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Method for etching aluminum metal films

Etching a substrate: processes – Gas phase etching of substrate – Etching inorganic substrate
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Method for etching ferroelectric film

Etching a substrate: processes – Gas phase etching of substrate – Etching inorganic substrate
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Method for etching passivation layers and antireflective...

Etching a substrate: processes – Gas phase etching of substrate – Etching inorganic substrate
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Method for fabricating microstructure and microstructure

Etching a substrate: processes – Gas phase etching of substrate – Etching inorganic substrate
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Method for forming pattern on steel substrate by reactive ion et

Etching a substrate: processes – Gas phase etching of substrate – Etching inorganic substrate
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Method for manufacturing resonant device

Etching a substrate: processes – Gas phase etching of substrate – Etching inorganic substrate
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Method for plasma etching of a perovskite oxide thin film

Etching a substrate: processes – Gas phase etching of substrate – Etching inorganic substrate
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Method for processing substrates using gaseous silicon...

Etching a substrate: processes – Gas phase etching of substrate – Etching inorganic substrate
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Method for removing at least one area of a layer of a...

Etching a substrate: processes – Gas phase etching of substrate – Etching inorganic substrate
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Method for removing at least one area of a layer of a...

Etching a substrate: processes – Gas phase etching of substrate – Etching inorganic substrate
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Method for selectively etching organosilicate glass with...

Etching a substrate: processes – Gas phase etching of substrate – Etching inorganic substrate
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Method of aligning nanotubes and wires with an etched feature

Etching a substrate: processes – Gas phase etching of substrate – Etching inorganic substrate
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Method of cleaning metallic films built up within thin film depo

Etching a substrate: processes – Gas phase etching of substrate – Etching inorganic substrate
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Method of etching a device using a hard mask and etch stop...

Etching a substrate: processes – Gas phase etching of substrate – Etching inorganic substrate
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Method of etching a metallic film on a substrate

Etching a substrate: processes – Gas phase etching of substrate – Etching inorganic substrate
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Method of fabricating microelectromechanical and...

Etching a substrate: processes – Gas phase etching of substrate – Etching inorganic substrate
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