4. Etching a substrate: processes
  5. Gas phase etching of substrate
  6. Etching inorganic substrate
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Radical generating method, etching method and apparatus for...

Etching a substrate: processes – Gas phase etching of substrate – Etching inorganic substrate
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Ridge and mesa optical waveguides

Etching a substrate: processes – Gas phase etching of substrate – Etching inorganic substrate
Reexamination Certificate

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