4. Etching a substrate: processes
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Hard masking method for forming oxygen containing plasma etchabl

Etching a substrate: processes – Gas phase etching of substrate – Etching inorganic substrate
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Heat treatment jig for semiconductor wafers and a method for tre

Etching a substrate: processes – Gas phase etching of substrate – Etching inorganic substrate
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High-rate dry-etch of indium and tin oxides by hydrogen and halo

Etching a substrate: processes – Gas phase etching of substrate – Etching inorganic substrate
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Honeycomb core degreasing method

Etching a substrate: processes – Gas phase etching of substrate – Etching inorganic substrate
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