Method for removing at least one area of a layer of a...

Etching a substrate: processes – Gas phase etching of substrate – Etching inorganic substrate

Reexamination Certificate

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Details

C216S077000, C216S096000, C216S100000, C134S017000, C134S019000, C134S055000

Reexamination Certificate

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11541253

ABSTRACT:
The invention relates to a method for removing an area of a layer of a component consisting of metal or a metal compound. According to prior art, corrosion products of a component are removed in a first step by applying a molten mass or by heating in a voluminous powder bed. This requires high temperatures or a large amount of space. The inventive method for removing corrosion products of a component is characterized in that a cleaning agent is applied locally, which removes the corrosion products by means of a gaseous reaction product.

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