Microfluidic systems with embedded materials and structures...

Microlens forming method

Microwave plasma discharge device

Microwave plasma processing method and apparatus

Minimizing arcing in a plasma processing chamber

Mitigation of radiation induced surface contamination

Molecular layers covalently bonded to silicon surfaces

Multi-electrode plasma processing apparatus

Multi-phase DC plasma processing system

Multi-temperature processing

Multibeam laser servowriting of magnetic data storage media

Multibeam laser servowriting of magnetic data storage media

Multilayer microstructures and laser based method for...

Multiple stage process for cleaning process chambers

Nanoimprint resist

Near substrate reactant homogenization apparatus

Near Substrate reactant Homogenization apparatus

Negative ion deductive source for etching high aspect ratio stru

Notch-free etching of high aspect SOI structures using...

Organic BARC etch process capable of use in the formation of...