Simplified etching technique for producing multiple undercut...

Single SOI wafer accelerometer fabrication process

Small scale actuators and methods for their formation and use

Solid state membrane channel device for the measurement and...

Spatial light modulator with multi-layer landing structures

Sputtered spring films with low stress anisotropy

Staggered torsional electrostatic combdrive and method of...

Stopper manufacturing method of a silicon micromachining structu

Substrate and method for microscopical observation of amorphous

Surface—micromachined rotatable member having a...

Surface-micromachined chain for use in...

Surface-micromachined microfluidic devices

Surfactant-enhanced protection of micromechanical components...

System for fabricating nanocoils using a wet etch technique

Technique for manufacturing micro-electro mechanical structures

Techniques of anisotropic wet etch micromachining for comb...

Thermal sensor/actuator in semiconductor material

Thermally efficient micromachined device

Thin film inductive write head with minimal organic insulation m

Thin film-planar structure and method for producing the same