Thermal sensor/actuator in semiconductor material

Details Thermal sensor/actuator in semiconductor material Thermal sensor/actuator in semiconductor material

1996-10-17

1998-11-03

Breneman, R. Bruce

Etching a substrate: processes

Etching of semiconductor material to produce an article...

216 56, 438 54, H01L 21302

Patent

active

058303723

ABSTRACT:
Semiconductor component with monolithically integrated electronic circuits and monolithically integrated sensor/actuator, whereby the sensor/actuator is manufactured with methods of surface micromachining in a sensor layer (3) of polysilicon that is structured, for example, with sensor webs (6), and these sensor webs (6) are thermally insulated from a silicon substrate (1) by a cavity (4) that is produced in a sacrificial layer (2) and is closed gas-tight toward the outside with a closure layer (5).

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