Micro needles and method of manufacture thereof

Micro-actuator and method making the same

Micro-electromechanical die module with planarized thick film la

Micro-fabricated electrokinetic pump

Micro-machining minute hollow using native oxide membrane

Microbellows actuator

Microelectromechanical capactive accelerometer and method of...

Microelectromechanical device manufacturing process

Microelectromechanical mirror and mirror array

Microelectromechanical signal processor fabrication

Microfabricated apertures for supporting bilayer lipid...

Microfabricated filter and shell constructed with a...

Microfabrication process for enclosed microstructures

Microfluidic device, and related methods

Micromachine manufacture using gas beam crystallization

Micromachined component and method of manufacture

Micromachined optical mechanical modulator based...

Micromachined parylene membrane valve and pump

Micromachined reflector antenna method

Micromachined relay and method of forming the relay