Etching a substrate: processes – Etching of semiconductor material to produce an article...
Reexamination Certificate
2000-12-22
2004-03-02
Olsen, Allan (Department: 1746)
Etching a substrate: processes
Etching of semiconductor material to produce an article...
C216S039000
Reexamination Certificate
active
06699394
ABSTRACT:
BACKGROUND
Micromachining is the science of forming various features on silicon structures. These features can be formed to relatively small sizes. Strength of the eventual features is a very important issue.
Thermopneumatic actuation can allow micro-sized fluid handling devices.
SUMMARY
The present disclosure describes using Parylene membranes along with micromachining of structure form various features. Another embodiment uses a composite of Parylene and silicone rubber to obtain certain advantages of each of the materials.
One embodiment teaches using robust Parylene membranes, formed using silicon micromachining technology, to form several fluid handling devices. These include a thermopneumatic actuator, valve, and pump, all of which operate using a heater in a thermopneumatic liquid. These devices have small size, high performance, low cost, and low power.
Another embodiment teaches using a composite of Parylene and silicone rubber.
REFERENCES:
patent: 4824073 (1989-04-01), Zdeblick
patent: 5075174 (1991-12-01), Pyle
patent: 5176358 (1993-01-01), Bonne et al.
patent: 5177579 (1993-01-01), Jerman
Yang et al., A MEMS Thermopnuematic Silicone Membrane Valve, Proceedings of IEEE the 10thAnnual International Workshop on Micro Electro Mechanical Systems, Jan. 1997, pp. 114-118.
Grosjean Charles
Tai Yu-Chong
Wang Xuan-Qi
Yang Xing
California Institute of Technology
Fish & Richardson P.C.
Olsen Allan
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