Etching a substrate: processes – Etching of semiconductor material to produce an article...
Patent
1998-02-23
2000-04-04
Ogden, Necholus
Etching a substrate: processes
Etching of semiconductor material to produce an article...
216 13, 216 17, 216 24, 216 26, 438 52, 438701, 438702, 438739, C23F 100, H01B 1300, B29D 1100
Patent
active
060457120
ABSTRACT:
A method of manufacturing a micromachined reflector antenna onto a substrate firstly etches a reflector aperture surface defining a dish cavity in an oxide layer and secondly rotates a hinge over the reflector aperture surface with the hinge being used as the reflector central feed. The micromachined reflector can be made into an array of reflector antennas and integrated onto a single substrate with front end receiver circuits operating as a high frequency receiver on a chip reduced in size and cost and operating at hundreds of GHz.
REFERENCES:
"Integrated Horn Antennas for Millimeter-Wave Applications", G. Rebeiz and D. Rutledge, Ann. Telecommun. 47, pp. 38-48, 1992.
"Microfabricated Hinges", K.S.J. Pister, N.W. Judy, S.R. Burgett, R.S. Fearing, Sensors and Actuators, A. 33, pp. 249-256, 1992.
"Applying Micro-Nanotechnology to Satellite Communications Systems", A.D. Yarbrough, ART-93 (8349)-1, The Aerospace Corporation, Mar. 31, 1993.
Cole Robert C.
Osofsky Samuel S.
Robertson Ruby E.
Yarbrough Allyson D.
Ogden Necholus
Reid Derrick Michael
The Aerospace Corporation
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