Bulk removal, transport and storage fixture for small batch-fabr

Details Bulk removal, transport and storage fixture for small batch-fabr Bulk removal, transport and storage fixture for small batch-fabr

1995-06-07

1998-01-13

Breneman, R. Bruce

Etching a substrate: processes

Etching of semiconductor material to produce an article...

216 56, 206724, 206725, 361809, H01L 2100, H05K 702

Patent

active

057075379

ABSTRACT:
The supporting plate and the bulk removal, transport and storage fixture for small batch-fabricated devices (1) have openings (2) penetrating from the top side (3) to the bottom side (4) of the plate and raised retaining means (5) on the bottom side (4). The raised retaining means (5) are provided in sufficient number and are arranged according to the shape of the devices (1) for retaining the devices. Flange means (7) which are designed for providing vacuum or agents to the devices (1) on the supporting plate are connected to the supporting plate thus forming a fixture. By changing the arrangement of the raised retaining means (5) and/or the openings (2) the supporting plate and the fixture may easily be adapted to different sizes and kinds of devices.

REFERENCES:
patent: 4185814 (1980-01-01), Buchmann et al.
patent: 4329642 (1982-05-01), Luthi et al.
patent: 5085321 (1992-02-01), Chew
patent: 5149162 (1992-09-01), Focke et al.
patent: 5335771 (1994-08-01), Murphy
patent: 5418692 (1995-05-01), Nemoto
patent: 5520297 (1996-05-01), Kagami et al.
TDB, Cornerless Chip Bank, 3L, No.5, May 1993 pp. 219-220.
TDB, Reversible Tray For IC Module, 36, No. 5, May 1993, pp. 395-396.

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