Design of a novel tactile sensor

Details Design of a novel tactile sensor Design of a novel tactile sensor

1997-10-30

1999-12-28

Powell, William

Etching a substrate: processes

Etching of semiconductor material to produce an article...

73862337, 73862381, 216 39, 216 79, B44C 122

Patent

active

06007728&

ABSTRACT:
An apparatus for sensing an applied force comprising a deflectable bridge, formed in a substrate and spanning a recessed area. The deflectable bridge also has a sensing element. The force is applied to the bridge and in response thereto, an output characteristic of the sensing element changes in proportion to the magnitude of the applied force. The apparatus can further comprise a sensing bump in contact with the bridge, wherein the force is applied to the bridge through the sensing bump.

REFERENCES:
patent: 4481815 (1984-11-01), Overton
patent: 4614119 (1986-09-01), Zavracky et al.
patent: 4808549 (1989-02-01), Mikkor et al.
patent: 5616514 (1997-04-01), Muchow et al.
patent: 5683546 (1997-11-01), Manaka

Affiliated with

Also associated with

Rating

Design of a novel tactile sensor does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Design of a novel tactile sensor, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Design of a novel tactile sensor will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2380126