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Semiconductor processing chamber substrate holder method and...

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Reexamination Certificate

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Semiconductor wafer lifting device and methods for...

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Semiconductor wafer processing apparatus and method

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Sensor apparatus and method for real-time in-situ measurements o

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Patent

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Shield for an electrostatic chuck

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Patent

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Single phase electrohydrodynamic pump

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Patent

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Specimen supporting device

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Patent

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Stable positively charged Teflon electrets

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Patent

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Stage system or device

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Patent

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Static chuck apparatus and its manufacture

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Patent

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Static electricity chuck apparatus and semiconductor...

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Substrate clamping technique in IC fabrication processes

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Patent

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Substrate hold apparatus and method for judging substrate...

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Substrate holder for retaining a substrate within a...

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Substrate holder which is self-adjusting for substrate...

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Reexamination Certificate

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Substrate holder which is self-adjusting for substrate...

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Reexamination Certificate

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Substrate holding system and exposure apparatus using the same

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Substrate holding system and exposure apparatus using the same

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Substrate holding system and exposure apparatus using the same

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Reexamination Certificate

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Substrate holding system and exposure apparatus using the same

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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