Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Patent
1983-08-09
1985-05-28
Moose, Jr., Harry E.
Electricity: electrical systems and devices
Electric charge generating or conducting means
Use of forces of electric charge or field
269903, H01T 2000
Patent
active
045204217
ABSTRACT:
A specimen support comprises a pair of specimen attracting portions each having an electrode on the lower side thereof through an electrically insulating member. The pair of specimen attracting portions is arranged in opposed relation to one side of the specimen to be attracted thereto and is made of semiconductive dielectric material. A voltage is applied between the pair of specimen attracting portions thereby to attract the specimen to the portions electrostatically.
REFERENCES:
patent: 3916270 (1975-10-01), Wachtler et al.
patent: 3983401 (1976-09-01), Livesay
patent: 4184188 (1980-01-01), Briglid
patent: 4384918 (1983-05-01), Abe
Minamikawa Yoshihisa
Sakitani Yoshio
Hitachi , Ltd.
Moose Jr. Harry E.
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