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Casimir effect conversion

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Reexamination Certificate

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Cathode assembly containing an electrostatic chuck for...

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Ceramic electrostatic chuck

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Patent

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Ceramic electrostatic chuck and method

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Ceramic electrostatic chuck and method of fabricating same

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Ceramic electrostatic chuck assembly and method of making

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Ceramic electrostatic chuck with built-in heater

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Ceramic electrostatic chuck with built-in heater

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Ceramic electrostatic chuck with built-in heater

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Ceramic member-electric power supply connector coupling structur

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Characterization, modeling, and design of an electrostatic chuck

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Patent

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Characterization, modeling, and design of an electrostatic chuck

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Patent

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Charged particle beam application system

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Chuck equipment

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Chuck for substrate processing and method for depositing a film

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Patent

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Chuck having pressurized zones of heat transfer gas

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Chuck, lithographic apparatus and device manufacturing method

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Chucking method and processing method using the same

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Clamping and de-clamping semiconductor wafers on a J-R...

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Clamping and de-clamping semiconductor wafers on an...

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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