Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Patent
1992-09-25
1994-12-27
Pellinen, A. D.
Electricity: electrical systems and devices
Electric charge generating or conducting means
Use of forces of electric charge or field
324715, 3241581, 279128, H02N 1300
Patent
active
053770714
ABSTRACT:
A system 20 for measuring the sheet resistance of a conductive layer on the top surface of a semiconductor wafer 22 is disclosed herein. In one embodiment, the system includes a chuck 30 electrically coupled to the backside surface of the wafer 22. The chuck 30 is capable of supporting the wafer 22 electrostatically. A signal source 40 provides an excitation signal to the wafer 22 and circuitry for monitoring an induced signal is provided. The sheet resistance on the top surface of the wafer 22 is determined from the measurements of the excitation and induced electrical signals. Other systems and methods are also disclosed.
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Donaldson Richard L.
Fleming Fritz M.
Kesterson James C.
Matsil Ira S.
Pellinen A. D.
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