High power electrostatic chuck contact
High temperature electrostatic chuck
High temperature electrostatic chuck
High temperature polyimide electrostatic chuck
High voltage micromachined electrostatic switch
High-performance electrostatic clamp comprising a resistive...
Holder for use in semiconductor or liquid-crystal...
Holding device for a substrate
Holding device, in particular for fixing a semiconductor...
Holding mechanism of object to be processed
Hybrid ceramic electrostatic clamp
Hybrid electrostatic chuck
Hybrid Johnsen-Rahbek electrostatic chuck having highly resistiv