Substrate holding system and exposure apparatus using the same

Details Substrate holding system and exposure apparatus using the same Substrate holding system and exposure apparatus using the same

2008-10-03

2010-06-08

Nguyen, Danny (Department: 2836)

Electricity: electrical systems and devices

Electric charge generating or conducting means

Use of forces of electric charge or field

C361S230000

Reexamination Certificate

active

07733625

ABSTRACT:
A substrate holding system including a substrate attracting device, an exhausting device, and a control device to operate the exhausting device so that a pressure around the substrate and a pressure at an interval between the substrate and the substrate attracting device are lowered to a first pressure and that only the pressure at the interval is subsequently lowered to a second pressure, which is lower than the first pressure.

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