4. Electricity: electrical systems and devices
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In situ monitoring of wafer charge distribution in plasma...

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Reexamination Certificate

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In-situ real-time sheet resistance measurement system and method

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Patent

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Insulated wafer spacing mask for a substrate support chuck and m

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Patent

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Integrated power modules for plasma processing systems

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Reexamination Certificate

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Integrated power modules for plasma processing systems

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Reexamination Certificate

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Isolated electrostatic chuck and excitation method

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Patent

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Isolated electrostatic wafer blade clamp

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Patent

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