Active electrostatic seal and electrostatic vacuum pump
Adhesive sheet and electrostatic chucking device
Anti-stick electrostatic chuck for a low pressure environment
Apparatus and method for actively controlling surface...
Apparatus and method for actively controlling the DC potential o
Apparatus and method for ex-situ testing of performance paramete
Apparatus and method for joining two substrates
Apparatus and method for separating adhering media electrostatic
Apparatus and method for temperature control of workpieces in va
Apparatus and method to angularly position micro-optical...
Apparatus and methods for compensating plasma sheath...
Apparatus for controlling backside gas pressure beneath a semico
Apparatus for energy extraction-I
Apparatus for igniting a plasma in a plasma processing chamber
Apparatus for improved biasing and retaining of a workpiece in a
Apparatus for improving wafer and chuck edge protection
Apparatus for manufacturing semiconductor device
Apparatus for moving along or through a material
Apparatus for regulating temperature of a process kit in a...
Apparatus for retaining a subtrate in a semiconductor wafer proc