Static chuck apparatus and its manufacture

Details Static chuck apparatus and its manufacture Static chuck apparatus and its manufacture

1998-01-22

2000-12-26

Sherry, Michael J.

Electricity: electrical systems and devices

Electric charge generating or conducting means

Use of forces of electric charge or field

H02N 1300

Patent

active

061668974

ABSTRACT:
The static chuck apparatus includes a metal substrate, a first adhesive layer provided on the metal substrate, a ceramic insulating plate provided on the first adhesive layer, a second adhesive layer provided on the ceramic insulating plate, an insulating film provided on the second adhesive layer, and an electrode provided between the second adhesive layer and the insulating film.

REFERENCES:
patent: 4645218 (1987-02-01), Ooshio et al.
patent: 4771730 (1988-09-01), Tezuka
patent: 5155652 (1992-10-01), Logan et al.
patent: 5384682 (1995-01-01), Watanabe et al.
patent: 5452177 (1995-09-01), Frutiger
patent: 5522131 (1996-06-01), Steger
patent: 5631803 (1997-05-01), Cameron et al.
patent: 5745331 (1998-04-01), Shamouilian et al.
patent: 5822172 (1998-10-01), White
patent: 5851641 (1998-12-01), Matsunaga et al.
patent: 5978202 (1999-11-01), Wadensweiler et al.

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