Machine and method for poling films of pyroelectric and piezoele
Machine and method for poling films of pyroelectric and piezoele
Machine unit having retaining device using static electricity
Mask apparatus for fine-line lithography
Mask holding device and method for holding mask
Membrane electrostatic chuck
MEMS based multi-polar electrostatic chuck
MEMS digital-to-acoustic transducer with error cancellation
MEMS digital-to-acoustic transducer with error cancellation
Method and an apparatus for offsetting plasma bias voltage in bi
Method and apparatus for balancing an electrostatic force produc
Method and apparatus for balancing an electrostatic force produc
Method and apparatus for balancing an electrostatic force...
Method and apparatus for chucking a substrate
Method and apparatus for clamping a substrate
Method and apparatus for compensating non-uniform wafer...
Method and apparatus for conditioning an electrostatic chuck
Method and apparatus for controlling chucking force in an...
Method and apparatus for controlling temperature of a substrate
Method and apparatus for dechucking a substrate