Magnetically enhanced capacitive plasma source for ionized...

Magnetically enhanced capacitive plasma source for ionized...

Magnetically-filtered cathodic arc plasma apparatus

Magnetron for low pressure full face erosion

Magnetron plasma apparatus with concentric magnetic means

Magnetron plasma source

Matching network for RF plasma source

Matching unit and plasma processing system

Mechanism for minimizing ion bombardment energy in a plasma...

Metal ion plasma generator having magnetic field forming device

Metal ion plasma generator having rotatable anode plate

Method and apparatus for controlling electrostatic coupling to p

Method and apparatus for controlling electrostatic coupling...

Method and apparatus for cooling electrons, ions or plasma

Method and apparatus for coupling a microwave source in an elect

Method and apparatus for determination and control of plasma...

Method and apparatus for energizing materials in an electric arc

Method and apparatus for forming an agile plasma mirror effectiv

Method and apparatus for generating a plasma

Method and apparatus for generating and utilizing a compound pla