Matching network for RF plasma source

Details Matching network for RF plasma source Matching network for RF plasma source

2007-11-20

2007-11-20

Lee, Wilson (Department: 2163)

Electric lamp and discharge devices: systems

Discharge device load with fluent material supply to the...

Plasma generating

C156S345280, C118S7230AN

Reexamination Certificate

active

10060826

ABSTRACT:
A compact matching network couples an RF power supply to an RF antenna in a plasma generator. The simple and compact impedance matching network matches the plasma load to the impedance of a coaxial transmission line and the output impedance of an RF amplifier at radio frequencies. The matching network is formed of a resonantly tuned circuit formed of a variable capacitor and an inductor in a series resonance configuration, and a ferrite core transformer coupled to the resonantly tuned circuit. This matching network is compact enough to fit in existing compact focused ion beam systems.

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