Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Plasma generating
Reexamination Certificate
2006-09-26
2006-09-26
Vu, David (Department: 2821)
Electric lamp and discharge devices: systems
Discharge device load with fluent material supply to the...
Plasma generating
C156S345440
Reexamination Certificate
active
07112926
ABSTRACT:
There are provided a matching unit capable of sufficiently matching the impedance of a high frequency load to a transmission path impedance without increasing its size and matching time even if a high frequency power of 70 MHz or higher is supplied thereto, and a plasma processing system using the same. A matching unit41comprises: a resonance rod61for transmitting a high frequency energy from a high frequency power supply40to a plasma producing electrode; a variable capacitor62, connected to the resonance rod61and an electrode21in series, for adjusting the imaginary part of an impedance complex number; a housing63which is provided outside of the resonance rod61and which is grounded; a link coil64for exciting a high frequency energy to the resonance rod61and for adjusting the real part of the impedance complex number; and a controller69for controlling a driving part for the variable capacitor62and the link coil64so that a series resonance circuit is formed between the high frequency power supply40and the ground via plasma in a matching state.
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Notification of the Recording of a Change (Form PCT/IB/306).
Preliminary Examination Report (in Japanese)—Form PCT/IPEA/409.
Form PCT/IPEA/401 (in Japanese).
International Search Report (Form PCT/ISA/210).
Cover page of PCT Publication WO 01/28300 A1 of PCT/JP00/07083.
Notice Informing the Applicant of the Communication of the International Application to the Designated Offices (Form PCT/IB/308).
Notification of Receipt of Record Copy (Form PCT/IB/301).
Notification Concerning Submission or Transmittal of Priority Document (Form PCT/IB/304).
PCT Notification of Transmittal of Copies of Translation of the International Preliminary Examination Report (PCT/IB/338) issued for PCT/JP00/07083.
International Preliminary Examination Report (PCT/IPEA/409) (translated) issued for PCT/JP00/07083.
Japanese Patent Laid-Open No. 162696/1999, Application No. 343684, issued on Jun. 18, 1999.
Himori Shinji
Shimada Jun'ichi
Watanabe Kazuyoshi
Yuasa Mitsuhiro
Smith , Gambrell & Russell, LLP
Tokyo Electron Limited
Tokyo Hy-Power Labs, Inc.
Vu David
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