Magnetic mirror plasma source and method using same

Details Magnetic mirror plasma source and method using same Magnetic mirror plasma source and method using same

2011-04-26

2011-04-26

Neckel, Alexa D (Department: 1723)

Electric lamp and discharge devices: systems

Discharge device load with fluent material supply to the...

Plasma generating

C118S7230AN, C118S7230FI, C204S298140, C204S298160, C315S111710

Reexamination Certificate

active

07932678

ABSTRACT:
A magnetic mirror plasma source includes a gap separating a substrate from a cathode. A mirror magnetic field extends between the substrate and the cathode through the gap. The magnetic field lines at a proximal surface of the substrate are at least two times as strong as those field lines entering the cathode. An anode is disposed such that a closed loop electron Hall current containment region is formed within the magnetic field.

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