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Apparatus and method for low pressure chemical vapor deposition

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Apparatus and method for magnetron in-situ cleaning of plasma re

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Apparatus and method for making aligned Hi-Tc tape superconducto

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Apparatus and method for making free standing diamond

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Apparatus and method for manufacturing a packaging material usin

Coating apparatus – Gas or vapor deposition – Running length work
Patent

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Apparatus and method for manufacturing a semiconductor device

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Apparatus and method for manufacturing a semiconductor device ha

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Apparatus and method for manufacturing an organic...

Coating apparatus – Gas or vapor deposition – Multizone chamber
Reexamination Certificate

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Apparatus and method for manufacturing magnetic recording...

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Apparatus and method for manufacturing semiconductor device

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Apparatus and method for manufacturing semiconductor device,...

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Apparatus and method for masking multiple turbine components

Coating apparatus – Gas or vapor deposition – Having means to expose a portion of a substrate to coating...
Reexamination Certificate

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Apparatus and method for microwave plasma process

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Apparatus and method for monitoring plasma processing apparatus

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Apparatus and method for nucleation and deposition of diamond us

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Apparatus and method for oxidation treatment of metal

Coating apparatus – Gas or vapor deposition – Having means to expose a portion of a substrate to coating...
Patent

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Apparatus and method for photo-induced process

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Apparatus and method for plasma deposition

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Apparatus and method for plasma enhanced chemical vapor...

Coating apparatus – Gas or vapor deposition – With treating means
Utility Patent

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Apparatus and method for plasma processing

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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