Apparatus and method for making aligned Hi-Tc tape superconducto

Details Apparatus and method for making aligned Hi-Tc tape superconducto Apparatus and method for making aligned Hi-Tc tape superconducto

1992-11-27

1994-10-18

Bueker, Richard

Coating apparatus

Gas or vapor deposition

Multizone chamber

118715, 118722, 118724, 118718, 505950, 505410, 505473, C23C 1600

Patent

active

053564740

ABSTRACT:
This invention relates to strontium titanate, hereinafter referred to as SrTiO.sub.3, films of the type produced by chemical vapor deposition (CVD) that are oriented so that the film's (100) face is parallel to the surface plane of the substrate. Such structures of this type, generally allow the SrTiO.sub.3 film to be deposited such that a high density capacitor or a buffer layer for a superconductor can be created.

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