Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate
2007-01-03
2011-10-18
Moore, Karla (Department: 1716)
Coating apparatus
Gas or vapor deposition
Work support
C118S719000, C204S297060, C204S298150, C414S941000, C427S131000
Reexamination Certificate
active
08038797
ABSTRACT:
A method and apparatus for manufacturing a magnetic recording medium uses a small-diameter insulating substrate. The apparatus includes a carrier for a special size of 3.5 inches for receiving a plurality of small-diameter insulating substrates. Seed layers are deposited on the substrates, then each substrate is rotated to shift the position of the substrate so that the movable claw contacts the deposited seed layer. A bias voltage is applied via the movable claw for subsequent deposition layers.
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Hara Akihide
Shimizu Takahiro
Ford Nathan K
Fuji Electric & Co., Ltd.
Moore Karla
Rossi Kimms & McDowell LLP
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