Apparatus and method for manufacturing an organic...

Details Apparatus and method for manufacturing an organic... Apparatus and method for manufacturing an organic...

2004-03-09

2011-10-11

Lund, Jeffrie R (Department: 1716)

Coating apparatus

Gas or vapor deposition

Multizone chamber

C118S720000, C118S721000, C118S715000

Reexamination Certificate

active

08034178

ABSTRACT:
An apparatus for manufacturing an organic electroluminescence display having an alignment chamber for aligning a mask having openings corresponding to a predetermined pattern with a substrate on which a first electrode layer is formed and detachably attaching the mask and the substrate. The apparatus further including a number of vacuum processing chambers for sequentially forming a number of organic material layers on the substrate attached with the mask. The apparatus also including a transfer robot for transferring the attached mask and substrate to one of the number of vacuum processing chambers and sequentially transferring it between the number of the vacuum processing chambers.

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