Coating apparatus – Gas or vapor deposition – Running length work
Patent
1995-09-13
1998-03-17
Bueker, Richard
Coating apparatus
Gas or vapor deposition
Running length work
118722, 118501, 427582, 427583, 4272555, 53140, C23C 1600, C23C 1648
Patent
active
057282242
ABSTRACT:
An apparatus and process are disclosed for depositing a barrier layer, such as an SiOx barrier layer, onto a moving web of substrate material in a continuous process at atmospheric pressure using a gaseous phase precursor and an oxidizer.
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United States Patent Serial No. 08/547,414 by Laurent et al., filed Sep. 13, 1995.
Decker Wolfgang
Laurent Jacques A.
Bueker Richard
Catania Michael A.
Lund Jeffrie R.
Tetra Laval Holdings & Finance S.A.
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