Apparatus and method for photo-induced process

Details Apparatus and method for photo-induced process Apparatus and method for photo-induced process

2005-03-15

2005-03-15

Hassanzadeh, Parviz (Department: 1763)

Coating apparatus

Gas or vapor deposition

With treating means

C118S620000, C118S641000, C156S345500

Reexamination Certificate

active

06866721

ABSTRACT:
Apparatus for a photo-induced process are provided, which implement a transparent film (instead of an optical window), to reduce light absorption loss that would result from use of an optical window. A photo-induced process apparatus eliminates problems of conventional systems which use optical windows, such as blurring an optical window and the surface of a light source, photo absorption loss due to the optical window and/or a purge cleaning gas, and dust generation by a moving part such as a flexible curtain. A photo-induced process apparatus efficiently utilizes light emitted from a light source.

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