Coating apparatus – Gas or vapor deposition – Crucible or evaporator structure
Patent
1994-12-08
1996-07-16
Breneman, R. Bruce
Coating apparatus
Gas or vapor deposition
Crucible or evaporator structure
118718, 118 50, 118308, C23C 1600
Patent
active
055363245
ABSTRACT:
In a gas deposition apparatus including: an ultra fine particle evaporation chamber; an evaporation source arranged in the ultra fine particle evaporation chamber; a deposition chamber; a substrate arranged in the deposition chamber; a transfer pipe connecting the ultra fine particle evaporation chamber with the deposition chamber; an inlet port of the transfer pipe indirect facing relationship to the evaporation source in the ultra fine particle evaporation chamber and an outlet port of the transfer pipe being in the deposition chamber; a nozzle connected to the outlet port of the transfer pipe, facing the substrate in the deposition chamber; and an introducing port for introducing inert gas into the ultra fine particle evaporation chamber wherein ultra fine particles are evaporated from the evaporation source by heating the latter. The particles are transported together with inert gas through the transfer pipe and they are ejected out from the nozzle onto the substrate to form a film or condensate of ultra fine particles thereon. In order to heat the transfer pipe, a DC power source is connected to the transfer pipe and a seethe heater is wound on the nozzle.
REFERENCES:
patent: 4668480 (1987-05-01), Fujiyashu
patent: 4791261 (1988-12-01), Phinney
patent: 5186120 (1993-02-01), Ohnishi
patent: 5203925 (1993-04-01), Shibuya
patent: 5221425 (1993-06-01), Blanchard
patent: 5290592 (1994-03-01), Izuchi
Breneman R. Bruce
Lund Jeffrie R.
Vacuum Metallurgical Co., Ltd.
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