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Metal organic chemical vapor deposition apparatus and...

Coating apparatus – Gas or vapor deposition – Crucible or evaporator structure
Reexamination Certificate

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Metal organic chemical vapor deposition method and apparatus

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Metal organic molecular beam epitaxy (MOMBE) apparatus

Coating apparatus – Gas or vapor deposition
Patent

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Metal vapor generator

Coating apparatus – Gas or vapor deposition – Crucible or evaporator structure
Patent

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Metallization module for cathode-ray tube (CRT) applications

Coating apparatus – Gas or vapor deposition – Crucible or evaporator structure
Reexamination Certificate

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Metallizing apparatus

Coating apparatus – Gas or vapor deposition
Patent

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Metallizing apparatus

Coating apparatus – Gas or vapor deposition
Patent

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Metered gas control in a substrate processing apparatus

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Metering and vaporizing particulate material

Coating apparatus – Gas or vapor deposition – Crucible or evaporator structure
Reexamination Certificate

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Metering of particulate material and vaporization thereof

Coating apparatus – Gas or vapor deposition – Crucible or evaporator structure
Reexamination Certificate

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Method and a device for epitaxial growth of objects by chemical

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Method and a system for sealing an epitaxial silicon layer...

Coating apparatus – Gas or vapor deposition – Having means to expose a portion of a substrate to coating...
Reexamination Certificate

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Method and a system for sealing an epitaxial silicon layer...

Coating apparatus – Gas or vapor deposition – Multizone chamber
Reexamination Certificate

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Method and apparatus diffusing zinc into groups III-V...

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Method and apparatus for a large volume plasma processor that ca

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Method and apparatus for aiming a barrel reactor nozzle

Coating apparatus – Gas or vapor deposition
Patent

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Method and apparatus for aligning a wafer chuck in a...

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Method and apparatus for an improved baffle plate in a...

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Method and apparatus for an improved baffle plate in a...

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Method and apparatus for an improved deposition shield in a...

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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