Metal vapor generator

Details Metal vapor generator Metal vapor generator

1987-03-02

1988-11-29

Bueker, Richard

Coating apparatus

Gas or vapor deposition

Crucible or evaporator structure

C23C 1424

Patent

active

047873337

ABSTRACT:
A metal vapor generator of the present invention is constituted to locate an airtight joint between a body with an opening around its top and a bottom plate, in the vicinity of the lower portion of the body. According to such an arrangement, since said airtight joint locates at a side where a powder metal depositing material such as copper, aluminum or the like is filled up within the vessel and whose particle size of the depositing metal material is large, penetration of the particles into the airtight joint is reduced, thereby facilitating the detachment between the bottom plate and the body.

REFERENCES:
patent: 3647197 (1972-03-01), Holloway
patent: 4197814 (1980-04-01), Takagi
patent: 4361114 (1982-11-01), Gurev
patent: 4484943 (1984-11-01), Miura
patent: 4668480 (1987-05-01), Fujiyashu
patent: 4700660 (1987-10-01), Levchenko

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