Layer forming apparatus

Details Layer forming apparatus Layer forming apparatus

1985-11-14

1987-12-01

Newsome, John H.

Coating apparatus

Gas or vapor deposition

With treating means

118 501, 118730, B05D 306

Patent

active

047096560

ABSTRACT:
There is disclosed layer forming apparatus for forming a deposition layer on a substrate by means of electric discharge, comprising a supporting electrode, and a cassette of a structure capable of accommodating therein a substrate for layer formation and being inserted into said supporting electrode and electrically connected therewith to cause electric discharge in said cassette.

REFERENCES:
patent: 4576830 (1986-03-01), Kiss
patent: 4582720 (1986-04-01), Yamazaki
patent: 4593644 (1986-06-01), Hanak

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