Coating apparatus – Gas or vapor deposition – With treating means
Patent
1988-03-29
1990-01-16
Bueker, Richard
Coating apparatus
Gas or vapor deposition
With treating means
156345, 315 39, 427 38, 427 451, C23C 1648
Patent
active
048935840
ABSTRACT:
Microwave energy apparatus adapted to sustain a substantially uniform plasma over a relatively large area. In the broadest form of the invention, an isolating window is disposed about the microwave applicator, said isolating window formed from a material through which the microwave energy can be transmitted from the applicator into a plasma reaction vessel and said isolating window configured in a shape which is substantially optimized to withstand compressive forces. In this manner, the thickness of the isolating window may be minimized to provide for rapid thermal cooling, wherby high power densities may be achieved without cracking the window.
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Doehler Joachim
Krisko Jeffrey M.
Bueker Richard
Energy Conversion Devices Inc.
Goldman Richard M.
Owens Terry J.
Siskind Marvin S.
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