Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent
1997-02-14
2000-11-28
Mills, Gregory
Coating apparatus
Gas or vapor deposition
Multizone chamber
118729, 118730, 118723, C23C 1606
Patent
active
061530131
ABSTRACT:
The deposited-film-forming apparatus of the present invention is an apparatus for forming deposited films while continuously passing a belt-like member through the insides of a plurality of vacuum chambers connected via connecting members and superposingly forming a plurality of different thin films on the surface of the belt-like member by plasma-assisted CVD, wherein the vacuum chambers are fixed to a stand for supporting the vacuum chambers, and a mechanism for relaxing stress acting in the transport direction of the belt-like member, generated in the vacuum chambers by the action of expansion and contraction due to thermal expansion of the vacuum chambers, is provided between each vacuum chamber and each connecting member.
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Hori Tadashi
Kanai Masahiro
Kohda Yuzo
Nishimoto Tomonori
Okabe Shotaro
Canon Kabushiki Kaisha
Mills Gregory
Zervigon Rudy
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