Deposition apparatus

Details Deposition apparatus Deposition apparatus

2011-06-21

2011-06-21

Chen, Keath T (Department: 1712)

Coating apparatus

Gas or vapor deposition

Crucible or evaporator structure

Reexamination Certificate

active

07964037

ABSTRACT:
A vacuum deposition apparatus capable of enhancing the productivity of an organic electroluminescence device is realized. A first pipe is connected to a deposition source for evaporating an organic electroluminescence material, and two second pipes are directed to two film deposition objects comprised of substrates and masks, whereby an organic deposition film is formed. Vapor is released simultaneously from the deposition source to plural film deposition objects on different planes to deposit films, which promotes the reduction in film deposition time and the miniaturization of an apparatus.

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