Delivering particulate material to a vaporization zone

Details Delivering particulate material to a vaporization zone Delivering particulate material to a vaporization zone

2011-08-09

2011-08-09

Chen, Keath T (Department: 1712)

Coating apparatus

Gas or vapor deposition

Crucible or evaporator structure

C118S724000

Reexamination Certificate

active

07993459

ABSTRACT:
It is an object of the present invention to provide an effective way of replenishing particulate material for vaporization. This object is achieved by a method for delivering material into a deposition chamber having a vaporization zone to vaporize such material to form a layer. The improvement includes providing a cartridge defining a cavity for receiving material under a controlled environment for preventing material contamination, receiving material from the cavity and translating such received material along a feed path to the vaporization zone and removably securing the cartridge to the deposition chamber.

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English translation of EP 585848, Aug. 1994, Haussler.

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