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Substrate transferring mechanism

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Substrate transport container

Coating apparatus – Gas or vapor deposition – Multizone chamber
Reexamination Certificate

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Successive vapour deposition system, vapour deposition...

Coating apparatus – Gas or vapor deposition – Multizone chamber
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Successive vapour deposition system, vapour deposition...

Coating apparatus – Gas or vapor deposition – Multizone chamber
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Surface treatment apparatus

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Synchronous multiplexed near zero overhead architecture for...

Coating apparatus – Gas or vapor deposition – Multizone chamber
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System and method for integrated oxide removal and...

Coating apparatus – Gas or vapor deposition – Multizone chamber
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System and method for vacuum deposition of thin films

Coating apparatus – Gas or vapor deposition – Multizone chamber
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System architecture of semiconductor manufacturing equipment

Coating apparatus – Gas or vapor deposition – Multizone chamber
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System for continuously washing and film-forming a semiconductor

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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System for fabricating a bipolar transistor

Coating apparatus – Gas or vapor deposition – Multizone chamber
Reexamination Certificate

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System for processing a workpiece

Coating apparatus – Gas or vapor deposition – Multizone chamber
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System for producing semicondutor layer structures by way of epi

Coating apparatus – Gas or vapor deposition – Multizone chamber
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System for providing a controlled deposition on wafers

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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System for supplying high-pressure medium gas

Coating apparatus – Gas or vapor deposition – Multizone chamber
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System providing a controlled deposition of wafers

Coating apparatus – Gas or vapor deposition – Multizone chamber
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System, method, and apparatus for continuous synthesis of...

Coating apparatus – Gas or vapor deposition – Multizone chamber
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Systems and methods for sealing in site-isolated reactors

Coating apparatus – Gas or vapor deposition – Multizone chamber
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Systems for forming films having high dielectric constants

Coating apparatus – Gas or vapor deposition – Multizone chamber
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Table top parylene deposition chamber

Coating apparatus – Gas or vapor deposition – Multizone chamber
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