Coating apparatus – Gas or vapor deposition – Multizone chamber
Reexamination Certificate
2007-08-28
2007-08-28
Moore, Karla (Department: 1763)
Coating apparatus
Gas or vapor deposition
Multizone chamber
Reexamination Certificate
active
10455767
ABSTRACT:
A process for producing single-walled carbon nanotubes in a continuous manner includes carbon plasma generation, plasma stabilization, and product deposition. The plasma is generated by electrical resistance heating or electron beam vaporization of feedstock. The plasma is stabilized with radio frequency energy from inductance coils and with electrical resistance heaters in the reactor. Stabilization homogenizes the plasma energy density and concentration, leading to a more efficient reactor. Finally, a transition metal catalyst and associated catalyst support are used to form the end product. The formation region may have variations of geometry and supporting equipment that will affect the rate and purity of the swcnt production. The formation region is immediately downstream from the plasma stabilization region. In addition, the entire apparatus is designed so that it can be mounted vertically such that continuous deposition of product can be applied with precision using an overhead robotic arm.
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Bracewell & Giuliani LLP
Lockheed Martin Corporation
Moore Karla
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